xLight has created an LPP source that delivers four times the power of the most advanced systems available today, according to the Gelsinger's post. ASML's Twinscan NXE:3600D has a 250W LPP source ...

xLight, a US startup aiming to commercialize particle accelerator driven free electron lasers (FELs) for use in semiconductor production, says it has raised $40 million in a series B round of venture ...