Photolithography - Wikipedia
网页Photolithography (also known as optical lithography) is a process used in the manufacturing of integrated circuits. It involves using light to transfer a pattern onto a substrate, typically a silicon wafer. The process begins with a photosensitive material, called a photoresist, being applied to the substrate.
光刻（Photolithography）介绍 - 知乎 - 知乎专栏
网页光刻胶是聚合物和一些化合物的混合物，在化合物中最重要的是一种Photo Acid Generator (PAG)的物质。. 当光子打到PAG上，就会产生一种酸（Acid)，然后这种酸和聚合物反应，把聚合物分解，这样聚合物就对显像剂 (developer)可溶解了。. 而这种酸在反应后又原封不动的 ...
Photolithography - an overview | ScienceDirect Topics
网页Photolithography is a technique used in the semiconductor industry and for preparing metal nanoparticles. It involves imaging a structure onto a light-sensitive resist on a substrate through a mask, allowing for mass production of nanostructures. Comprehensive Nanoscience and Technology, 2011. About this page. Chapters and Articles.
光刻 - 维基百科，自由的百科全书
网页光刻工艺 （英语：photolithography 或 optical lithography，台湾称为 微影製程）是 半导体器件制造 工艺中的一个重要步骤，该步骤利用曝光和显影在光阻层上刻画几何图形结构，然后通过 刻蚀 工艺将光掩模上的图形转移到所在 衬底 上。. 这里所说的衬底不仅包含 矽 ...
微影 - 維基百科，自由的百科全書
网页在手动字词转换规则中检测到错误 （英語：photolithography 或 optical lithography，中國大陸作 光刻工藝）是 半導體元件製造 製程中的一個重要步驟，該步驟利用曝光和顯影在光阻層上刻畫幾何圖形結構，然後通過 蝕刻 製程將光罩上的圖形轉移到所在 基板 上 ...
Photolithography: A Step-By-Step Guide - AZoNano
网页2023年2月27日 · Photolithography is a patterning process where a photosensitive polymer is selectively exposed to light through a mask, thus creating a latent image (or pattern) in the polymer that can then be developed and selectively dissolved to expose the desired parts of the underlying substrate.
Photolithography | Stanford Nanofabrication Facility
网页Photolithography is the process used to transfer patterns of geometric shapes to a flat substrate. The substrates are first coated with a material called resist, then light (called photolithography) is used to catalyze reactions in the resist to create the shape of the pattern.
Photolithography - SpringerLink
网页Photolithography is a process used in microfabrication to selectively pattern a thin film substrate using light to transfer a geometric pattern from a photomask to a light-sensitive photoresist. Introduction. Lithography is a technique used to transfer copies of a master pattern onto the surface of a solid material such as a silicon wafer.
Multi-level patterning nucleic acid photolithography - Nature
网页2019年8月23日 · Here we demonstrate a multi-level photolithographic patterning approach that starts with large-scale in situ surface synthesis of natural, modified or chimeric nucleic acid molecular structures...
Photolithography (Lithography) - IEEE Xplore
网页Photolithography is to make device patterns on the surface of semiconductor substrate. During photolithography, ultraviolet light passes through the pattern windows of the mask, and the intensity that the photoresist receives is uniform. This chapter discusses the lithography process.
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